About Lab.We conduct research on advanced micro/nano production technology, which can be applied to the next-generation ultra-precision manufacturing by focusing on photon energy, which is the ultimate energy believed to be the root of our life. Especially we are developing photon based cutting-edge techniques for micro/nano manufacturing science, such as laser-assisted nano-in-process measurement, laser-assisted nano-processing and structuring, and a novel concept about a future micro production system, cell-in-micro-factory, with which we can product innovative micro/nano functional devices supporting our future life.
In order to realize our target, not only conventional light energy propagating in free-space but also localized light energy emerging at near-field region of bulk material is applied to our research from both a practical viewpoint as manufacturing techniques and a scientific viewpoint based on basic physics.
Our research involves (a) proposal of new concept not only about elemental technology but also about a whole production system, (b) theoretical and experimental analyses unraveling its characteristics, and (c) experimental verification for practical realization.

  1. Nano-stereolithography using evanescent light energy.
  2. In-process super-resolution high-sensitive optical measurement for nano-defects in semiconductor industry.
  3. Laser direct fabrication of three-dimensional microstructures using photocatalyst nanoparticles.
  4. Study on cell-in-micro-factory based on active control of localized photon energy as a future micro production system.
  5. Measurement of micro-sphere based on whispering gallery mode resonance


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