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ISMTII2017@西安にて,孔君,叶君,橘君が発表,高橋が招待講演

ISMTII2017(13th International Symposium on Measurement Technology and Intelligent Instruments)が,2017年9月22日〜25日の日程で,中国西安にて開催されました.

当研究室からは,孔徳卿君(D2),叶世蔚君(D2),橘一輝君(D1)が研究発表を,高橋が招待講演をしました.

孔:In-process measurement on the thickness of photosensitive resin inevanescent wave-based nano-stereolithography.

叶:Experimental verification of a novel in-process depth measurements of sub-diffraction limited micro-groove based on near-field optical response.

橘:Development of nanoparticle detection method based on a new principle combining volatile liquid and optical observation method: Study of highly sensitive optical detection system.

高橋:High sensitive and super resolution optical inspection of nanodefects on Si wafer surface using infrared standing evanescent wave.